Pneumatic NC (normally closed) valves are widely used in high density microfluidics systems. To improve actuation reliability, the actuation pressure needs to be reduced. In this work, we utilize 3D FEM (finite element method) modelling to get an insight into the valve actuation process numerically. Specifically, the progressive debonding process at the elastomer interface is simulated with CZM (cohesive zone model) method. To minimize the actuation pressure, the V-shape design has been investigated and compared with a normal straight design. The geometrical effects of valve shape has been elaborated, in terms of valve actuation pressure. Based on our simulated results, we formulate the main concerns for micro valve design and fabrication, which is significant for minimizing actuation pressures and ensuring reliable operation. (C) 2018 Elsevier B.V. All rights reserved.